Coating Process

Suitable coating processes are necessary to enhance production capability. Optorun optical thin film coaters are developed based on coating process requirements.

Vacuum Coating

When coating materials are heated in vacuum, they are evaporated and formed as thin films on substrate surfaces. Such processes are called vacuum coating. High quality thin films are formed in vacuum by getting rid of impurities.

Evaporation is a reliable and versatile method, being capable of coating various metallic and dielectric materials. Higher coating rate and good thin film distribution are obtainable by use of resisting and electron beam evaporators.

Ion Assisted Deposition

Ion assisted deposition (IAD）is to enhance thin film adhesion and quality. Energetic ions from ion sources hit thin films on substrates, lifting the packing density of such films. This is how quality thin films are formed

The tuning of electron beam evaporators and ion sources can be done independently, which makes easy to seek suitable process parameters, such as to deposit low-absorption or stress-free films. Unparallel production reliability and film properties are obtained in such a way with ion assisted deposition.

Ion assisted deposition is applied in OptorunSPOC series (Vacuum Deposition System for DWDM Filter) and OTFC series (Optical Thin Film Coater). The research is being made in Optorun to apply OTFC series to optical, energy, information, and other applications.

Low Temperature Sputtering

Heat induced during common coating processes requires that the substrates have to be heat durable ones, like glass. This is negative for coating on poor heat durable substrates, like of polymer or soft materials. Optoun is developing low temperature coating process by use of face target sputtering (FTS)