Plasma Enhanced Atomic Layer Deposition System

ALDER-800P

ALDER-800P is plasma-enhanced ALD system and can produce optical multilayer coatings on plastic.

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Conformal coating on complex and textured surface such as lenses,fibers,etc.

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Available for several optical thin films such as Al2O3,TiO2,SiO2,etc.

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75 piece of trays(φ 100mm).

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Low temperature deposition using plasma exposure.

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Short cycle time by shortening gas feeding and plasma exposure time.