Optical Monitor

DHOM-T

Direct Optical Monitor

DHOM-T monitors directly, in real time, the optical film deposited on the substrate mounted on a rotating dome in its deposition process.

Monitoring wavelength range is 350-1100 nm or 350 - 2400 nm.
特長
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Direct monitoring of the optical thickness of the sample mounted on rotating dome
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Variable and readily adjustable monitoring position
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Conventional indirect monitoring system optionally installed in the same coater, and direct or indirect monitoring system optionally chosen for each film layer

Specifications

Model DHOM2-T DHOM4-T
Wavelength range 350 ～ 1100nm 350 ～ 2400nm
Detection method Transmittance
Light Source Halogen lamp
Power Requirements AC100V ± 10%, 50/60Hz
　

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