连续式光学薄膜形成装置

COFC-1300

COFC-1300 is a continuous optical thin films coater consisting of three chambers. Transferring work pieces without breaking vacuum, this can mass-produce continuously the optical filters.

特長
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Non-vibrating carrier (dome) transfer system
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Central rotation system to improve rotational precision and to restrain particle generation
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Max rotational speed at 20rpm to improve thickness controllability
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12 points type high precision optical thickness monitor
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Quartz crystal microbalance monitor (max 80 monitors)
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Sophisticated film quality by RF ion source
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Automatic dome mounting system (Automatic carrier transfer system as option). Extra vacuum chamber as option

Specifications

Vacuum chamber
(3 chamber type)		 Load chamber + Deposition chamber + Unload chamber
(Selectable loading/unloading type)
Vacuum load/unload
chambers (2 chambers)		 SUS 304,
1500mm (L) × 1500mm (D) × 1560mm (H) approx.
Deposition chamber
(w/ 2 gate valves)		 SUS 304,
1500mm (L) × 1500mm (D) × 1560mm (H) approx.
Ultimate vacuum pressure ≤1.5 × 10-4 Pa
Ultimate evacuation time
in countinuous runs		 ≤5 - 10 min (7.0 × 10-3 Pa)
Substrate dome φ 1200 mm
Rotational speed 5 - 20 rpm
Evaporator (two sources) Electron gun (w/automatic source material feeding system)
RF ion source φ 17cm
　

Utility Requirements

Power Requirements 3phase+G、200V ± 5％、140kVA approx.、50/60Hz
Cooling Water Flow Rate ≥200ℓ/min each of 3 inlets
Gross Weight 25000 kg approx.
　

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