Products
ALDER　Plasma enchanced atomic layer deposition system

A device capable of film deposition on three-dimensional shapes, achieving optical properties unattainable with conventional deposition methods.

Features

  • Ultra-low reflectivity coating below 0.1% in the visible light spectrum
  • Conformal coating on steep three-dimensional surfaces
  • Wide-angle anti-reflective coating on both sides of high-curvature lenses
  • Low-temperature plasma deposition on plastic lenses
  • Achieves realistic and vivid images free from ghosting and flare
ALDER Plasma enchanced atomic layer deposition system

Application fields

  • Smartphone

    Smartphone

  • LED

    LED

Specification

A800PBS A1000PC
Vacuum Chamber W880mm×D1100mm×H1700mm W900mm×D900mm×H1150mm
Chamber Box W360mm×D900mm×H360mm W374mm×D700mm×H800mm
Rotary Substrate-rack φ300 holder×25,30rpm φ350 holder×40,30rpm
Plasma Source ICP(Inductively coupled plasma)
Precursor Feeder Precursor bottle,ALD valve,Precursors
(TMA,3DMAS,TiCI4,etc)
Exhaust System Dry pump
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