Products
COFC　Continuous Evaporation System

Continuous optical thin-film deposition system with two auxiliary heating chambers added to the vapor deposition chamber
The high processing speed achieved by the substrate dome transport mechanism is well-suited for the mass production of anti-reflective coatings.

Features

  • Controlling optical film thickness with a multi-point high-precision reflective optical monitor
  • Equipped with an automatic feeding mechanism compatible with granular and pellet materials
  • Ideal for anti-reflective coatings
  • Fully automated dome transport and film deposition system
COFC Continuous Optical Film Coating

Application fields

  • Smartphone

    Smartphone

Specification

COFC-1300
Vacuum Chamber φ1510mm×H1558mm
Substrate Dome Size φ1200mm
Evaporation Source EB Souce:2 Unit
Ion Source RF Ion Source
Optical Film Thickness Control System HOM2-R-VIS400A
Wavelength range: 400-1100nm
Reflectin
Crystal Film Thickness Monitor 20-point Crystal film monitor
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