ProductsDSC Optical thin film sputtering system
Sputtering equipment for optical thin-film filters.
Equipped with automatic vacuum handling and inversion mechanisms to achieve high-quality mass production.
Suitable for anti-reflective and anti-soiling coatings on concave and convex surfaces of automotive lenses, as well as anti-reflective coatings, high-reflective coatings, and hard coatings on optical components.
Features
- Dual Chamber: AR+AS coating on both sides of the product in a single process
- Single Chamber: AR coating on both sides of the product in a single process
- Accommodates up to 8 target positions
- Stable discharge achieved with dual rotating cylindrical targets
- High loading capacity and short process time make it ideal for mass production
Application fields
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Car
Specification
| DSC-1650 | |
| Vacuum Chamber | φ1650mm×H1500mm |
| Substrate Holder | 16 pcs |
| Rotary Substrate Drum System | φ1545mm Drum Type 10rpm~100rpm(Variable) |
| Reaction Source | ICP(Inductively coupled plasma) |
| Sputtering Source | Dual rotary cathode |
| Exhaust System | Roughing pump,Turbo molecular pump |