Products
Gener　Ion Source beam assisted deposition system

Optical thin-film deposition equipment designed and manufactured for mass production of anti-reflective coatings

Features

  • The dome rotation employs a magnetic seal-driven central rotation system, enabling stable and uniform film distribution.
  • Improved exhaust characteristics and heating capability enable shorter film deposition cycle times.
  • Optical monitoring system, DC ion source, and resistance heating evaporation source can be optionally installed.
  • Gener-2350/2750 enables the deposition of combined anti-reflective and anti-soiling films.
Gener Ion-Assisted Deposition Equipment

Application fields

  • Smartphone

    Smartphone

  • Car

    Car

  • その他

    Security cameras

  • Head-mounted display/smart glasses

    Head-mounted display/smart glasses

Specification

Gener-1300 Gener-2350 Gener-2750
Vacuum Chamber φ1300mm×H1500mm φ2350mm×H1400mm φ2750mm×H1880mm
Substrate Dome Size φ1200mm,4sectional φ2200mm,5sectional φ2640mm,4sectional
Evaporation Source EB Souce: 1 Unit EB Souce: 1 Unit / Movable AS Source
Ion Source RF Ion Source
Crystal Film Thickness Monitor 6-point Crystal film monitor
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