Products
NSC　Optical thin film sputtering system

High-performance, highly productive load-lock metal mode sputtering system.

Features

  • Cathode and other components are interchangeable
  • Low-absorption films via highly reactive plasma source
  • Low particle levels achieved through optimized deposition system and transport system
NSC Optical thin film sputtering system

Application fields

  • Smartphone

    Smartphone

  • Car

    Car

Specification

NSC-15 NSC-2350 NSC-2500
Vacuum Chamber LL Room：W500mm×D800mm×H2890mm
PR Room：φ1650mm×H1200mm 		LL Room：W700mm×D1860mm×H1760mm
UL Room：W700mm×D1860mm×H1760mm
TR Room：W660mm×D1860mm×H1760mm
PR Room：φ2350mm×H1950mm 		LL Room：φ2950×H2250mm
PR Room：φ2500mm×H2250mm
Substrate Holder Selectable13-22 pcs a holder Selectable15-22 pcs a holder 12 ocs
Rotary Substrate Drum System φ1500mm Drum Type
10rpm-100rpm(Variable) 		φ2245mm Drum Type,10rpm-50rpm(Variable) φ2250mm、
10rpm-50rpm(Variable)
Reaction Source ICP(Inductively coupled plasma)
Sputtering Source Dual rotary cathode
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