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HOM・DHOM　Optical Monitor

Optical film thickness gauges for vacuum deposition equipment used for depositing anti-reflective coatings and various optical filters.
A wide range of models are available, with wavelengths from 220nm to 5500nm, allowing for selection of monitoring systems tailored to specific applications based on monitoring method, measurement method, and resolution.
A newly developed "direct transmission monitor" allows for direct monitoring of the optical thin film on a rotating dome-shaped substrate during deposition.

Features

  • It is possible to directly monitor and control the optical film thickness of the substrate on the rotating dome.
  • The monitoring position on the dome can be changed.
    (Adjustments can be made before film deposition.)
  • It can be installed simultaneously with conventional joint monitors using monitor glass, and switching control is possible at each layer.
HOM・DHOM Optical Monitor

Specification

HOM2 HOM4-R/T/RT HOM-5-T-IR2000 DHOM-T HOM-R-DUV200
Wavelength Range 350～1100nm 350～240nm 1700～5500nm 350～2400nm 200～400nm
Power Requirements AC100V±10%、50/60Hz㎝ AC100V±10%、50/60Hz AC100V±10%、50/60Hz AC100V±10%、50/60Hz AC100V、50/60Hz
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