Products
OTFC　Ion Source beam assisted deposition system

OTFC series, based on the ion-assisted technology, are the most suitable coating system for producing AR coatings and optical filters such as edge filters, band pass filters etc.

Features

  • Chamber size：φ600mm - φ1800mm
  • 60-point optical thickness monitor.
  • RF ion source achieving uniformed, larger ion beam distribution over a larger area at high ion current density.
  • Over 100 layers can be deposited by 2 EB guns and multi-point crucible hearth or annular hearth.
  • Auto-deposition control system for fully automated process.
  • Center-driving or planetary substrate dome is selectable.
  • Diffusion pumps plus Polycold or Cryo- pumps.
OTFC Ion Assist Deposition Equipment

Application fields

  • Smartphone（Display）

    Smartphone

  • Car

    Car

  • Medical devices

    Medical devices

  • Optical communication

    Optical communication

  • LED

    LED

  • その他

    Security cameras

  • Head-mounted display/smart glasses

    Head-mounted display
    /smart glasses

Specification

OTFC-900 OTFC-1100 OTFC-1300 OTFC-1550 OTFC-1800
Vacuum Chamber φ900mm×H1300mm φ1100mm×H1520mm φ1300mm×H1610mm φ1550mm×H1800mm φ1800mm×H1920mm
Substrate Dome Size φ790mm φ950mm φ1130mm φ1400mm φ1600mm
Evaporation Source EB Souce:2 Unit
Ion Source RF Ion Source
Optical Film Thickness Control System HOM2-R-VIS350A
Wavelength range: 350-1100nm
Reflectin/Transmittance
Crystal Film Thickness Monitor 6-point Crystal film monitor
Exhaust System Roughing Pump,Diffusion Pump+Meissner Chiller
or Cryo Pump+Cryo Trap
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