Products
SPOC　Super Multilayer Optical system

Optical Thin Film Deposition System Adapted for DWDM/CWDM Filters for 5G Optical Communications
High-precision film thickness control enables the production of various ultra-multilayer optical filters.

Features

  • High-precision film deposition control is achieved through an optimized high-resolution optical film thickness monitor and control system.
  • Magnetic Seal High-Speed Substrate Rotation Mechanism Achieves Higher Film Thickness Uniformity
  • High-capacity Φ600 material hearth electron gun and 14-point quartz film thickness gauge for ultra-multilayer film applications
  • Optimized RF ion source delivers superior film thickness and film quality uniformity
SPOC Super Multi-Layer Film Deposition Equipment

Application fields

  • Optical communication

    Optical communication

Specification

SPOC-1000 SPOC-1300
Vacuum Chamber φ1100mm × H1300mm φ1300mm × H1610mm
Substrate Dome Size φ90,φ150mm φ500mm
Evaporation Source EB Souce:2 Unit
Ion Source RF Ion Source
Crystal Film Thickness Monitor 14-point Crystal film monitor 6-point Crystal film monitor
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