特殊规格光学镀膜机

OTFC-PX

OTFC-PX是搭载了行星回转机构与离子源，适用于多种曲率面型的透镜，反光镜的光学薄膜蒸镀的光学镀膜机。

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采用行星回转机构，提高表面分布情况

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可以改变的基板架角度，在球面基板上实现高均匀性镀膜

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采用离子束辅助蒸镀（IAD）方式，提高薄膜质量

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光学式膜厚监控，实现高性能光学薄膜的蒸镀

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大型真空室（Ф1800）搭载行星回转机构，提高生产能力

OTFC-PX, equipped with a planetary dome and ion source is suitable for coating a reflector and lenses with high curvature.

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Planetary dome improves coating uniformity over substrate.

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Dome angle can be inclined in accordance with lens curvature.

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IAD system greatly improves film quality.

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High precision spectrum property at spherical substrate can be obtained at high accuracy by optical monitor.

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Large size chamber (1800 mm in diameter) with planetary dome increases productivity.