Plasma Enhanced Atomic Layer Deposition System


ALDER-800P is plasma-enhanced ALD system and can produce optical multilayer coatings on plastic.

Conformal coating on complex and textured surface such as lenses,fibers,etc.
Available for several optical thin films such as Al2O3,TiO2,SiO2,etc.
75 piece of trays(φ 100mm).
Low temperature deposition using plasma exposure.
Short cycle time by shortening gas feeding and plasma exposure time.