Plasma Enhanced Atomic Layer Deposition System

ALDER-800TBS

ALDER-800TBS(A800TBS) with load-lock system is a thermal-mode ALD system and produces functional films with high uniformity, at high throughput,and with high repeatability.

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Designed for LED applications with high throughput.

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High reliable and repeatability.

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Short cycle time(<6s).

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Long maintenance cycle.