Optical Thin Film Coater for mass production

Gener-2750

Gener-2750 is a large scaled IAD coater to produce decorative,anti-reflection,and anti-smudge (AS) coatings.

特長
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Large area substrate dome,φ2640
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High thtoughput
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High reproducibility and homogeneous distribution
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Only one process to make AR＋AS coatings

Specifications

Chamber Size φ 2750mm × H1880mm
Substrate Dome φ 2640mm, Five-sectional
Max. Dome Rotation Speed 20rpm
Crystal Film Thickness Monitor 6-point Crystal flim monitor
Evaporation Source One unit of EB source, Movable AS source
Ion Source RF Ion Source
　

Performance

Ultimate Pressure 7.0 × 10-5Pa or lower
Pumping Speed 15 min (From atmospheric pressure to 1.3 × 10-3 Pa）
　

Utility Requirements

Installation Space 7500 (W) ×10000 (D) ×3600mm (H)
Power Source 3-phase, 200V ± 10%、150kVA、50/60Hz
Minimum Water Flow 220ℓ /min
Air Pressure 0.5 - 0.7 MPa
Weight 15000kg, approx.
　

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