Optical Thin Film Sputtering Coater
NSC-2350
NSC-2350 is metal mode sputter for optical thin film and,especially,optimal system for large area substrates.
The AR＋AS film for panels ob mobile terminal device,automobile,ect.
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Large coating area:H1100mm × W450 mm at max
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6 Cathodes at Maximu
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Replacement of cathode with optional component
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High reactive plasma source for low absorption film
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Load-lock type substrate holder transfer system
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Low particle film by opimizing deposition and transfer systems
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AR/AS Coating By One Process
Specifications
| Vacuum Chamber | LL Room: SUS304, W700 mm×H1860 mm×D17600 mm UL Room: W700×H1860×D1760mm TR Room:W660×H1860×D1760mm PR Room:SUS304,φ2350×H1950mm |
| Substrate Holder | Selectable 15 - 22 pcs |
| Rotary substrate drum system | φ2245 mm, Drum Type, 10 rpm - 50 rpm (Tunable) |
| Reaction source | ICP (Inductively coupled plasma) |
| Sputtering source | Dual Rotary cathode (Planner type as option) |
| Evacuation system | Roughing pump, Turbo molecular pump,Meissner chiller |
Performance
| Ultimate Pressure | LL Room: 10 Pa PR chamber: ≤2.0 × 10-4 Pa |
| Pump Down Rate | LL Room: ≤8 min (from atmospheric to 10 Pa) PR Room: ≤40 min (from atmospheric to 9.0×10-4 Pa) |
Utility Requirements
| Installation Space | 7000 mm (W)×6600 mm (D)×4000 mm (H) |
| Electricity | 3-phase+G, 380V ± 5％、300kVA、50/60Hz |
| Min.Water Flow Rate | 400ℓ/min or greater(Pressure:0.6-0.7 Mpa) |
| Compressed Air Pressure | 0.5 MPa - 0.7 MPa |
| Gross Weight | 30000 kg approx. |
