Ion Source

OIS-CDM

OIS-CDM can measure the ion current density of ion source.

It is automatically measurable with a option dedicated program.

Source voltage	AC 100 V ± 15 ％
Bias Power (inside)	0 to ± 60 V/0.5 A
Standard measurement range	± 199.99 mA to ± 1.9999 mA
Accessories	Gauge head, Cable, Feedthrough
Standard gauge head	φ30 mm (φ8 mm, Measurement plane), 10 pcs
Scanning points	32 points
Measurements	480 × 99 × 330 mm