Ion Source

OIS-GL

Gridless DC Ion Source

OIS-GL is low voltage, high current gridless ion source, and has been developed for substrate cleaning, ion assisted deposition, etc.

Various optical filters can be produced by installing it in Gener-1300 or the OTFC series.

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Well-suited to substrate cleaning and resin substrate coating.

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Wide beam angle at low energy and high current, designed for large area over φ1200.

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High operational stability by improving the cooling method.

Specifications