Ion Source


Gridless DC Ion Source

OIS-GL is low voltage, high current gridless ion source, and has been developed for substrate cleaning, ion assisted deposition, etc.

Various optical filters can be produced by installing it in Gener-1300 or the OTFC series.

Well-suited to substrate cleaning and resin substrate coating.
Wide beam angle at low energy and high current, designed for large area over φ1200.
High operational stability by improving the cooling method.


Model OIS-GL
Size φ163mm × 200mm (H)
Discharge voltage 50V - 300V
Discharging current (max) 8A
Gas flow rate 5sccm - 50sccm( argon)
10sccm - 100sccm( oxygen)
Pressure 3.5 × 10-2 Pa or lower
Warter-cooling Anode and beam unit
Neutralizer Tungsten (W) filament